diff --git a/pkg/analyzer/CHANGELOG.md b/pkg/analyzer/CHANGELOG.md
index dbca635c476..0d5fb279652 100644
--- a/pkg/analyzer/CHANGELOG.md
+++ b/pkg/analyzer/CHANGELOG.md
@@ -1,3 +1,7 @@
+## 6.7.0-dev
+* Deprecated `File.createSource()`, it violates levels of abstraction.
+  You can get `Source` instances from `AnalysisResult`s.
+
 ## 6.6.0
 * Stop exporting `src/file_system/file_system.dart`
   from `file_system/file_system.dart`.
diff --git a/pkg/analyzer/lib/file_system/file_system.dart b/pkg/analyzer/lib/file_system/file_system.dart
index 411d2e62f1a..c99a701d4e8 100644
--- a/pkg/analyzer/lib/file_system/file_system.dart
+++ b/pkg/analyzer/lib/file_system/file_system.dart
@@ -31,6 +31,7 @@ abstract class File implements Resource {
   File copyTo(Folder parentFolder);
 
   /// Create a new [Source] instance that serves this file.
+  @Deprecated('Get Source instances from analysis results')
   Source createSource([Uri? uri]);
 
   /// Synchronously read the entire file contents as a list of bytes.
diff --git a/pkg/analyzer/lib/file_system/memory_file_system.dart b/pkg/analyzer/lib/file_system/memory_file_system.dart
index 1146b5a756d..2d1eb0ca3d5 100644
--- a/pkg/analyzer/lib/file_system/memory_file_system.dart
+++ b/pkg/analyzer/lib/file_system/memory_file_system.dart
@@ -354,6 +354,7 @@ class _MemoryFile extends _MemoryResource implements File {
     return destination;
   }
 
+  @Deprecated('Get Source instances from analysis results')
   @override
   Source createSource([Uri? uri]) {
     uri ??= provider.pathContext.toUri(path);
diff --git a/pkg/analyzer/lib/file_system/overlay_file_system.dart b/pkg/analyzer/lib/file_system/overlay_file_system.dart
index 1be0be7df8b..205acb5d71d 100644
--- a/pkg/analyzer/lib/file_system/overlay_file_system.dart
+++ b/pkg/analyzer/lib/file_system/overlay_file_system.dart
@@ -167,6 +167,7 @@ class _OverlayFile extends _OverlayResource implements File {
     }
   }
 
+  @Deprecated('Get Source instances from analysis results')
   @override
   Source createSource([Uri? uri]) =>
       FileSource(this, uri ?? provider.pathContext.toUri(path));
diff --git a/pkg/analyzer/lib/file_system/physical_file_system.dart b/pkg/analyzer/lib/file_system/physical_file_system.dart
index 0086901777b..e82f04e0ad7 100644
--- a/pkg/analyzer/lib/file_system/physical_file_system.dart
+++ b/pkg/analyzer/lib/file_system/physical_file_system.dart
@@ -136,6 +136,7 @@ class _PhysicalFile extends _PhysicalResource implements File {
     return destination;
   }
 
+  @Deprecated('Get Source instances from analysis results')
   @override
   Source createSource([Uri? uri]) {
     return FileSource(this, uri ?? pathContext.toUri(path));
diff --git a/pkg/analyzer/pubspec.yaml b/pkg/analyzer/pubspec.yaml
index cc53679db09..51d49ff0aad 100644
--- a/pkg/analyzer/pubspec.yaml
+++ b/pkg/analyzer/pubspec.yaml
@@ -1,5 +1,5 @@
 name: analyzer
-version: 6.6.0
+version: 6.7.0-dev
 description: >-
   This package provides a library that performs static analysis of Dart code.
 repository: https://github.com/dart-lang/sdk/tree/main/pkg/analyzer