diff --git a/cli/tsc/99_main_compiler.js b/cli/tsc/99_main_compiler.js
index 59fa75d776..d09df7b0ff 100644
--- a/cli/tsc/99_main_compiler.js
+++ b/cli/tsc/99_main_compiler.js
@@ -609,7 +609,7 @@ delete Object.prototype.__proto__;
       specifier,
       languageVersion,
       _onError,
-      _shouldCreateNewSourceFile,
+      shouldCreateNewSourceFile,
     ) {
       if (logDebug) {
         debug(
@@ -624,6 +624,10 @@ delete Object.prototype.__proto__;
       // Needs the original specifier
       specifier = normalizedToOriginalMap.get(specifier) ?? specifier;
 
+      if (shouldCreateNewSourceFile) {
+        sourceFileCache.delete(specifier);
+      }
+
       let sourceFile = sourceFileCache.get(specifier);
       if (sourceFile) {
         return sourceFile;